דף 1 מתוך 1

Nanotechnology Seminar

נשלח: 13:03 11/06/2019
על ידי topazl
Nanotechnology Seminar, Wednesday, June 12th, 12:00
IKI Auditorium, Building 51, room 015

Short demo sessions will be delivered on the FIB in lab 016 after the talk. In those sessions, the following applications will be demonstrated: 1) cut-and-see; 2) TEM lamella preparation; 3) STEM-EDX analysis.
Please register to the demo in advance by sending your name to forti@bgu.ac.il.

Dual Beam at BGU, new capabilities for 3D Nano-scale Materials Characterization

Dror Horvitz
Thermo Fisher Scientific, Israel
Nitzan Maman
Ilse Katz Institute for Nanoscale Science and Technology, Ben-Gurion University of the Negev, Israel

Abstract:

DualBeam™ combines a field emission SEM (scanning electron microscope) for looking at materials at high resolution with a FIB (focused ion beam) used to modify the surface of materials. This combination allows non-destructive investigation with the SEM and material milling or deposition with the FIB. Recently a new DualBeam of Thermo Fisher Scientific was purchased and installed at the Ilse Katz Institute for Nanoscale Science and Technology in BGU. This powerful new analytical tool provides new capabilities of surface and sub-surface investigation, extracting material biopsies for other techniques like TEM samples or nanomechanical pillars, serial slicing and imaging of materials to create 3D image stacks, and material modification for characterization using other accessory techniques such as energy dispersive spectroscopy or electron backscattered diffraction.
The first and most easy application is surface and sub-surface investigation that is possible via simple cut-and-see-what-is-beneath-the-surface exploration. It is often used when scouting for an ideal location. This investigation has many benefits on its own, but targeted material modification can also be used for more advanced patterning for specific experimental needs as well.
Second use, and by far the most pervasive application of DualBeam systems is site-specific material biopsy where by a sub sample of a material can be extracted from the bulk and shaped as required for another technique, such as S/TEM lamella preparation. This technique can also be used for preparation of atom probe samples or to extract larger chunks for other techniques as 3D serial slicing.
Third usage of the dual beam tool is ion beam nano patterning, in which patterns like pillars, lines, complicated images and arrays can be easily milled into surfaces with micro- or nano- scale dimensions.
An additional important automated process is 3D serial slicing. In this technique, an area is identified for serial slicing and the site is exposed by making trenches on at least three sides before capturing images or performing analysis on successive slices of the material. The image stacks created are assembled into a 3D model, which can be used to extract data about microstructure, composition and phase distribution within the sampled volume.
The DualBeam has evolved from a difficult to use manual combination of separate FIB and SEM systems to a highly automated tool for material science. This transformation is helping materials scientists to extract relevant parts of their samples for advanced analysis and is enabling new discoveries and increasing peer-reviewed publication quality and efficiency.